Wafer manufacturing is one of the most fundamental and critical processes in the semiconductor industry. The main steps include:
Silicon Purification: Extract ultra-pure silicon (99.9999%+) from sand to produce polysilicon.
Single Crystal Silicon Growth:
Melt polysilicon using Czochralski method
Dip a seed crystal and rotate/pull to form a single crystal ingot
Common diameters: 150mm(6"), 200mm(8") or 300mm(12")
Ingot Processing:
Trim ends and outer edges
Slice ingot into 0.5-1mm thick wafers using diamond saw
Grind and polish to achieve extremely flat surfaces
Oxidation: Grow silicon dioxide insulating layer through high-temperature oxidation
Photolithography:
Apply photoresist coating
Expose through photomask
Develop to create circuit patterns
Etching: Remove unprotected material using chemical or physical methods
Ion Implantation: Dope silicon with specific ions to form transistor structures
Chemical Vapor Deposition (CVD): Deposit thin films of various materials
Metallization: Create interconnect metal layers
Testing & Packaging: Perform electrical tests, dice into individual chips and package
The entire manufacturing process must be conducted in ultra-clean environments (cleanrooms), may involve hundreds of process steps, and can take several weeks to complete.
TEL